Temporary planar electrical contact device and method using vertically-compressible nanotube contact structures

ABSTRACT

A wafer-scale probe card for temporary electrical contact to a sample wafer or other device, for burn-in and test. The card includes a plurality of directly metallized single-walled or multi-walled nanotubes contacting a pre-arranged electrical contact pattern on the probe card substrate. The nanotubes are arranged into bundles for forming electrical contacts between areas of the device under test and the probe card. The bundles are compressible along their length to allow a compressive force to be used for contacting the probe card substrate to the device under test. A strengthening material may be disposed around and/or infiltrate the bundles. The nanotubes forming the bundles may be patterned to provide a pre-determined bundle profile. Tips of the bundles may be metallized with a conductive material to form a conformal coating on the bundles; or metallized with a conductive material to form a continuous, single contact surface.

RELATED APPLICATION INFORMATION

This application is a continuation of U.S. patent application Ser. No.12/211,354, filed Sep. 16, 2008, entitled “Temporary Planar ElectricalContact Device and Method Using Vertically-Compressible Nanotube ContactStructures”, which is a divisional of U.S. patent application Ser. No.11/426,249, filed Jun. 23, 2006, and issued as U.S. Pat. No. 7,439,731,on Oct. 21, 2008, entitled “Temporary Planar Electrical Contact Deviceand Method Using Vertically-Compressible Nanotube Contact Structures”,which claims the benefit of the following U.S. Provisional Applications:

-   -   Provisional Application Ser. No. 60/694,049 filed Jun. 24, 2005        entitled “Wafer-scale test probe card using nano-tube        vertically-compressible contact structures for the purpose of        wafer-level-burn-in and wafer-level test;”    -   Provisional Application Ser. No. 60/757,444 filed Jan. 9, 2006        entitled “Method and apparatus for making temporary contact to a        planar electrical device, such as a semiconductor wafer or flat        panel;” and    -   Provisional Application Ser. No. 60/778,205 filed Mar. 2, 2006        entitled “Method and apparatus for making temporary electrical        contact to a planar electrical device, such as a semiconductor        wafer or flat panel.”

Each of these Applications is hereby incorporated herein by reference inits entirety.

TECHNICAL FIELD

The present invention relates in general to integrated circuit (IC)devices and, more particularly, to a method and apparatus for burn-inand testing of such devices, and similar planar structures usingnanotubes.

BACKGROUND OF THE INVENTION

Large numbers of identical integrated circuits (ICs) such asmicroprocessors, memory devices, and digital signal processing devicesare generally fabricated on a silicon wafer. Due to defects that mayoccur during fabrication, each IC (or “die”) on the wafer is typicallyseparately tested or sorted by test equipment such as automatic testequipment (ATE) and probe cards. Probe cards may be capable of makingtemporary conductive contact to a single die or a small cluster of dice,and in limited applications, whole wafers. The ATE may complete thewafer-level test by sequentially stepping a probe card through theindividual die or die-cluster locations across the wafer until all diceon the wafer have been tested. The test signals are provided to each diethrough input or input/output bond pads on each die, and the testresults are monitored on output bond pads. The good die that pass thewafer-level test are then singulated and packaged typically byelectrically connecting the bond pads to the package with bond wires,solder balls, or other contact structures. To accommodate the bondingwires or solder balls, the bond pads are generally very large relativeto the circuit elements of the integrated circuit. Typical bond padsizes are on the order of 100 um (micrometers)×100 um. The bond pads arealso typically aligned in regular patterns such as peripherally alongthe outside perimeter of the die, in a grid pattern, or in a column orrow generally through the center of the die (lead-on-center).

While wafer-“level” test is well established in the industry, there isno accepted means for wafer-“scale” test or wafer-“level” “burn-in.”Moreover, established probe technologies are limited to device ACtesting at or below 1-2 GHZ frequencies. The present invention overcomesthese limitations.

The bond pads allow each die separately to be functionally tested forspecified timing parameters (AC parameters), DC parameters, and overalloperation. When probing chips or wafers, it is important to have aplanar set of probe contacts so that each probe contact can makesimultaneous electrical contact to a respective chip contact. It is alsoimportant to have the contacts on the wafer coplanar. Typically, if thetips of the probe contacts do not lie in approximately the same plane,or if some of the contacts on the wafer are out of plane, more forcemust be exerted on the back of the probe in an effort to engage all ofthe probe contacts with the chip contacts. This typically leads tonon-uniform forces between the tips of the probe contacts and the wafercontacts. If too much force is placed on any one probe contact, there isa potential to degrade the chip contacts, which can detrimentally affectdevice performance and consequently affect device yield. Planarity anduniform probe contact force are also important in order to haveapproximately the same ohmic resistance across all of the probe contactsso that the electrical signals have approximately the same level ofintegrity. Loss in signal integrity can detrimentally affect deviceperformance and consequently affect device yield. In most cases, therecan be hundreds of thousands of contacts across a single wafer.Maintaining similar ohmic probe to chip contact resistance is especiallyimportant for accurate testing of chips that are designed to be run athigh speeds. For such high speed chips, it is also important to controlthe impedance of the probe tester (resistance, capacitance & inductance)as a whole to maintain the integrity of the electrical signals to allowthe desired range of parametric testing.

In a conventional manufacturing process flow, following packaging, theICs are subjected to what is referred to in the industry as a Burn-In(BI) process, in which the ICs are electrically activated simultaneouslywhile subjected to temperature cycling over a period of hours to days.This burn-in process is used to accelerate and screen early lifefailures of the ICs, thus ensuring high reliability of the component. Inthis conventional process, the packaged ICs are inserted into anelectrical socket which makes contact to the IC package pins. Theburn-in sockets are mounted to large burn-in boards which are loadedinto large thermal cycling ovens which can handle very large volumes ofICs. The burn-in sockets are designed to take advantage of the large pinspacing and pin size in comparison to the finer bond-pad pitch and sizeas described previously. Although at a very high cost to the electronicsindustry, the relatively large pin size and spacing and relatively lowpin count and high planarity found within a single die, has enabled thesingle-die-per-socket IC burn-in approach to be widely adopted.

One disadvantage of the current approach to IC burn-in is high cost. Dueto the requirement for custom burn-in sockets for each new IC or ICpackage design, short product design lifetime (as little as 12 months)and the long burn-in cycle time, the burn-in process requires a hugeinvestment in burn-in sockets and processing time to support the volumesof ICs which are manufactured today.

Another disadvantage of this method of IC burn-in is that it commonlymust be done only after packaging of the IC or in a few instances, tosingulated bare-die. While this technique can be used for conventionalsingle-die packaging, or multi-chip packaging, this technique cannot beused when die-to-wafer or wafer-to-wafer integration of ICs is required.To enable die-to-wafer or wafer-to-wafer integration, a means to doWafer-Level-Burn-In and Test (WLBI, WLBIT) has been proposed.

While acceptable means for wafer-level single/clustered die test andsingle-die burn-in have been employed, the industry has not yet found anacceptable means of employing wafer-“level” burn-in and wafer-“scale”test.

Wafer-level burn-in has not been adopted because of the lack of anacceptable solution to the problems described above, and in addition:

1. Difficulty in achieving satisfactorily uniform ohmic resistanceacross the wafer.

2. Due to ohmic resistance non-uniformity, and lack of contactredundancy per pad, there is no way to ensure all die are beingactivated, and hence, there is no way to ensure all die have beenadequately burned-in, thus allowing potential early life failures toescape into the field. Because there are tens of thousands of contactpads on a wafer, which all must be contacted, this is a major problem.

3. High compressive forces are needed to compress prior-art micro-springprobe contacts in order to make good, low-ohmic resistance contact. Thishigh compressive force damages the IC bond pad, or worse can damage theIC's dielectric layers which can be extremely fragile, especially withthe recent adoption of low-k dielectric materials. In the case of bumpedICs used for chip-scale packaging, no damage to the bump surface isallowed, preventing the use of micro-spring probe cards altogether. Inspecific applications, there are probe contacts which contact and cutinto two opposing sides of an interconnect bump, similar in principle,to a pair of tweezers. This configuration is limited to only large ballsizes/pitches such as in Ball-Grid-Array (BGA) packaged ICs.

4. When multiplying the high compressive force per contact by tens ofthousands of contacts, the mechanical fixturing required to maintainthis high compressive force between the wafer and probe card would beexcessively large, heavy and costly for wide use in wafer-level burn-in,where ICs must be cycled for up to days within a temperature cycle oven.

5. Excessive initial cost and damage-induced cost associated withintricate, fragile mechanical structure based probe cards, such asmicro-spring or membrane or Micro-Electro-Mechanical-Systems (MEMS)based probe cards, has prevented these prior-art technologies from beingaccepted.

What is needed is a method for wafer-level burn-in and test whichresolves these problems, and provides advantages over other priorapproaches proposed. These prior approaches include:

1. Epoxy-ring cantilever spring contact probe cards—use limited byvariation in contact force, limited contact point aerial density due tothe space required for the epoxy ring, high cost intricate manualfabrication, high electrical inductance, and IC pad pitch or patternlimited to low density pad arrays. This prior art is also known to causesevere damage to IC pads, referred to in the industry as “padscrubbing”.

2. Micro-spring probe-cards fabricated through either mechanicalformation or electroplated micro-mechanical assembly - use limited byhigh cost, susceptibility to damage, limited to lower bond pad aerialdensity devices due to the minimum achievable micro-spring size, limitedaerial coverage (cannot achieve full wafer-scale probing), limited or norepair-ability, susceptibility to causing IC bond pad damage throughmicro-indentation. Micro-indentation is unacceptable for bumped ICs,especially those used in chip-scale packaging.

3. MEMS probe card having micro-machined mechanical probes bonded torigid substrates. Limited range or amount of probe compliance (cannotscale to full-wafer probing due to insufficient range of compliance),high cost due to many intricate fabrication steps, limited aerialcoverage difficulty to repair, susceptibility to causing IC bond paddamage.

4. Membrane probe cards having micro indenting tips deposited onto thesurface of a flexible circuit board—limited probe compliance, high cost,no full-wafer probing capability, high cost, limited probe contact forceresulting in poor IC pad contact reliability.

Each of these methods is limited to single or small-area probing due tothe highly complex, intricately assembly of microstructures associatedwith their application to probe cards. Due to their complexity, eachprior-art method suffers from low yield and associated high cost whenattempts are made to fabricate them in large arrays or at high aerialdensities.

SUMMARY OF THE INVENTION

The shortcomings of the prior art are overcome and additional advantagesare provided by the present invention which in one aspect is a planarelectrical contact layer, facilitating temporary contact between asample under test and a probe card substrate having a pre-arrangedelectrical contact pattern corresponding to a pattern on the sample. Theplanar layer includes a plurality of single-walled or multi-wallednanotubes, directly metallized at their bases, to allow contact to thepre-arranged electrical contact pattern on the probe card substrate.

The nanotubes may be arranged into a plurality of bundles, each bundleforming an electrical contact corresponding to areas on the sample andon the probe card between which a temporary contact is required. Thebundles are compressible along their length to allow a compressive forceto be used for contacting the probe card substrate to the sample. Astrengthening material may be disposed around and/or infiltrate thebundles.

The nanotubes forming the bundles may be patterned to provide apre-determined bundle profile. The profile may be nanotubes of varyingheight, allowing a varying degree of contact between the bundle and thesample depending on the amount of compressive force applied to thebundle.

Tips of the nanotubes of the bundles which will form the temporarycontact to the sample may metallized with a conductive material to forma conformal coating on the nanotubes of the bundles; or are metallizedwith a conductive material to form a continuous, single contact surface.The tips may be metallized into a pre-determined shape, such as flat,pyramid, cone, ziggurat, or blade.

In operation, with bases of the bundles contacting and/or affixed to theareas of the electrical contact pattern of the probe card substrate viatheir metallization, the layer is positioned over the pattern on thesample, with the bundles of nanotubes in electrical contact with theirrespective areas on the sample, for testing of the sample using signalscarried through the probe card substrate.

The sample to be tested may be a wafer having multiple, individual die,and wherein the layer and the bundles formed thereon are sized tosimultaneously contact and test a single, all or substantially all ofthe individual die across the wafer, with the nanotubes of a size smallenough to contact electrical patterns on the individual die (e.g., <250nm, preferably <100 nm).

To form the electrical probe discussed above, in one embodiment, anarrangement of nanotubes is formed on a first substrate. A secondsubstrate is provided having a pre-arranged electrical contact patterncorresponding to a pattern on a sample to be tested. At least some ofthe nanotubes are transferred from the first substrate to the secondsubstrate, thereby forming a probe device comprising the secondsubstrate and the transferred nanotubes.

To effect the transfer, a conductive material may be applied to the endsof the nanotubes, and/or to the second substrate in areas to which thenanotubes are to be contacted; and the first and second substrates arealigned and moved together such that the ends of the nanotubes contactand adhere to the areas of the second substrate, by activating theconductive material to facilitate adhesion of the ends of the nanotubesto the areas. The substrates may then be moved apart such that thenanotubes separate from the first substrate and remain attached to theareas of the second substrate.

In another embodiment for forming an electrical probe device, asubstantially homogeneous layer of nanotubes is formed over a firstsubstrate. A second substrate is provided having a pre-arrangedelectrical contact pattern corresponding to a pattern on a sample to betested. At least some of the nanotubes are transferred from the firstsubstrate to the electrical contact pattern on the second substrate,thereby forming the probe device having the second substrate and thetransferred nanotubes. To effect the transfer, the layer of nanotubes isremoved from the first substrate and bonded to the second substrate.Some nanotubes transferred to the second substrate are ablated (e.g.,laser ablation) at areas in which no nanotubes are desired. Afterablation, the nanotubes form a plurality of bundles, each bundle formingan electrical contact corresponding to a point on the test sample towhich a temporary contact is required.

In another embodiment, a method is provided for forming a probeinterface layer for temporarily carrying signals between a probe cardand a sample under test. A plurality of bundles of nanotubes is formedover a substrate, and a strengthening material is disposed around thebundles, with the strengthening material and bundles together forming alayer. The layer is removed from the substrate such that the bundles runfrom an upper surface of the layer to a lower surface of the layer. Theremoved layer comprises the probe interface layer, having a custom orgeneralized pattern, serving as an interface between a probe card and asample under test. The layer can have a generalized pattern, such thatit can be used temporarily between a probe card's contact pattern and asample under test, independent of the particular pattern on the probecard, with any non-contacted bundles simply going un-used.

Further additional features and advantages are realized through theapparatus and techniques of the present invention. Other embodiments andaspects of the invention are described in detail herein and areconsidered a part of the claimed invention.

BRIEF DESCRIPTION OF THE DRAWINGS

The subject matter regarded as the invention is particularly pointed outand distinctly claimed at the conclusion of the specification. Theforegoing and other objects, features, and advantages of the inventionare apparent from the following detailed description taken with theaccompanying drawings in which:

FIGS. 1 a-o depict a process flow and associated structures for forminga probe card in accordance with a first embodiment of the presentinvention;

FIGS. 2 a-j depict a process flow and associated structures for forminga probe card in accordance with a second embodiment of the presentinvention;

FIGS. 3 a-o depict a process flow and associated structures for forminga probe card in accordance with a third embodiment of the presentinvention;

FIGS. 4 a-n depict a process flow and associated structures for forminga probe card in accordance with a fourth embodiment of the presentinvention.

FIGS. 5 a-b depicts a set of example nanotubes, single-walled or multiwalled;

FIG. 6 is an isometric view of an exemplary probe card of the presentinvention;

FIG. 7 is a photograph of bundles of nanotubes representative of theprobe card of the present invention;

FIGS. 8 a-j depict a process flow and associated structures for forminga universal probe interface layer in accordance with another embodimentof the present invention; and

FIG. 9 depicts an embodiment of the present invention having a flexiblesubstrate.

DESCRIPTION OF THE INVENTION

The present invention relates to the test or burn-in of semiconductorintegrated circuits (ICs) or other, integrated electrical components,such as, but not limited to Light Emitting Diodes, (LEDs), Flat PanelDisplays (FPDs), Electrical Transducing circuits, or other such planarelectrical circuits. For simplicity, all of these types of electricaldevices will be referred to as Integrated Circuits (ICs). The presentinvention includes a new method to make temporary electrical contact toICs, for the purpose of either testing or activating the electricaldevice. The bond pads are disposed on the IC in a predeterminedalignment such as a peripheral, grid, or lead-on-center alignment. Thisinvention relates to a new method of making temporary contact to such arange of IC bond pad configurations. The present invention also includesthe unique processes used to produce articles which employ the newmethod described herein. The present invention applies to the testing oractivation of a single device or simultaneous activation of multipleplanar electrical devices, ICs. The present invention can be describedas an arrangement of electrical contactors to form what is commonlyreferred to as a Probe Card, Test Head, Burn-In Card or Burn-In Socket.This invention will be referred to as a probe card or test head assemblyfor simplicity.

This invention includes a new probe-card or test head concept thatutilizes any three-dimensional nano-structure, such as Carbon-Nano-Tubes(CNTs) or Germanium-Nano-Tubes (GeNTs), as an integral part of theelectrical contacting method. These structures will be referred to asNanoTubes (NTs). This invention describes the unique advantages of suchNT-based probe cards, designed to solve specific, known problems in theIC manufacturing industry. This invention describes special processeswhich enable the fabrication of these NT probe cards in such uniqueconfigurations.

As discussed above the present invention involves the formation oflong-chain, three-dimensional-molecule NTs of the exemplary types 10 a,10 b, and 10 c shown in FIG. 5 a deposited orthogonally onto the surfaceof a planar first substrate (not shown). The first substrate provides abase in which a regular, defined pattern of NTs can be formed and heldin place. The first substrate can also form a planar mandrel or mold,into which NTs can be temporarily deposited and subsequently transferredto a second substrate. The first substrate may be specifically used forthe growth of the NTs, while the second substrate may be used to formelectrical interconnections to the NTs. The NTs 10 have thecharacteristic of being highly electrically conductive axially, andrelatively electrically insulative, radially. When highly insulative,radially, this gives the NTs the unique characteristic similar to thatof microscopic insulated wire, or of an electrically conductive,vertically-compressible pillar, capable of carrying an electricalcurrent from the base to the tip. The NTs can be either Single-WalledNano-Tubes (SWNT) or Multi-Walled Nano-Tubes (MWNT). One example of ananotube is formed of a graphene Carbon-Lattice rolled into acylindrical “tube.” The structure is based on the C60 “Buckyball.”Typical mechanical properties include elastic columnar-beam behavior,naturally vertical structure, with a density in the millions/cm2.Typical electrical characteristics include metallic behavior, withcurrent densities up to 109 A/cm2. A cross-section of a multi-wallednanotube is shown schematically in FIG. 5 b. A multi-walled tube mayinclude concentric graphene cylinders, 10-30 walls, with an outerdiameter of 10-30 nm. Potential Advantages of multi-walled tubes includehigh current carrying capacity (CCC), crash-tolerance (resilient),probe-over-active/low-K possible, tailored pad force, low LC, fast risetimes (low-L, low-K<0.25 g/cm3), sub-10 um-sq pad on <20 um pitch,scalability, cost effective/short lead-time, and low costmanufacturing—LPCVD process.

The first substrate can be chemically modified to allow selective growthof the NT molecules. This modification can be achieved through:

1. Deposition and patterning of a chemically inert layer over achemically active substrate. The patterned inert layer blocks regions ofthe surface of the substrate, thus defining the inclusion and exclusionzones for deposition of the NT molecules. The inclusion zones, are thosein which chemically active regions of the substrate are exposed to thereagents during NT deposition. The exclusion zones are those areas belowthe patterned inert layer for which the nucleation sites of the NTmolecules are blocked.

2. Deposition, patterning and directly etching a chemically active layeron the substrate, which will define the subsequent inclusion andexclusion zones of NT deposition. This active layer performs either anucleation or catalytic reaction during the deposition of the NTs. Theexclusion zones are those areas in which this active layer has beenremoved. The inclusion zones are those in which the active layer remains(e.g., Process Flow 1 below). As discussed below, the active layer canbe placed into a Chemical Vapor Deposition (CVD) chamber, with one ormore catalytic precursor gases flown into the chamber and the NTs 112are grown only in the areas in which the active-area film exists to arange of 100 um to 2 mm, preferably 200 um to 500 um, with maximum tubedensity.

The constituency of the NTs discussed herein can be altered to optimizeparticularly desirable characteristics in many ways, enabling theelectrical and mechanical characteristics of the probe card to betailored to a particular application. Some of these modifiers includebut are not limited to:

1. Chemical doping segments of the NT pillar during or after completionof the NT deposition step. These modifiers may include the use oforgano-metallics, or other pre-cursors or material groups. Thus, theelectrical characteristics at specific locations on the NT can bemodified with other semiconductors or metallics such as: Ge, Pd, Co.,etc.

2. The NT vertical pillars can be branched at a desired stage in thedeposition process to form a horizontal plane, web-like or mesh-likesurface. This surface can be useful in structurally linking the NTstogether at a desired location for the purpose of increasing compressivestiffness or improving the overall rigidity of the NT bundles.

3. The compression force or “spring rate” of the NT probe contact can bemodified by varying certain process conditions during the NT depositionto selectively produce Single-Walled Nano-Tubes (SWNT) or Multi-WalledNano-Tubes (MWNT). This characteristic can result in the equivalent of aprogressive-spring rate compression spring. Preferably, the bundles arecompressible between 2.5% and 25% of their length.

4. The NT pillar compression morphology can be modified to ensure thatthe NTs vertically collapse or “buckle” under compressive load ratherthan flatten out laterally. This buckling phenomenon allows the NTpillar deformation be confined to the space within the natural spacingbetween adjacent NT pillars. This spacing between NT pillars istypically is between 30-60 nm, while the NT pillar is typically between10-30 nm in diameter. NT pillars which have undergone the maximumcompression, typically down to 10% of their original length, exhibit abuckling pattern that has the appearance of a pleated fabric. Thus theNT pillars bundles can undergo 90% compression (i.e., compress to 10% oforiginal length) without any observable spread in the outermost boundaryof the NT pillar bundles.

The NT vertically-conducting pillars have another unique characteristicof being highly compressible, elastic and resilient—thus capable ofperforming as electrically conductive vertical micro-springs, which canbe compressed repetitively without deformation or fracture. As describedherein, the first or second substrate on which the NTs are deposited canalso be electrically conductive, thus allowing electrical current to becarried through the substrate through the NTs, and finally to theelectrical device.

As an opening example of the structure of a probe card 52 in accordancewith the present invention, with reference to FIG. 6, the NTs canarranged into a wafer-scale or panel-scale array of bundles 12 a . . .12 x of electrically conductive vertically-compressible NT pillars whichcan be patterned in pad areas 24 a . . . 24 x and which alignspecifically to the electrical input-out bond pads of an electricaldevice (IC) under test (not shown). By forming the NTs in this way ontopad areas 24 a . . . 24 x, the NTs form highly redundant contacts,ensuring a multitude of high-electrical-continuity contacts are madebetween a contact pattern 25 on the probe card substrate 22 and the IC(not shown) through the NT bundles 12. With reference to FIG. 7, aphotograph of a similar arrangement of exemplary circular nanotubebundles 60 is shown, projecting from an underlying substrate. Thebundles are spaced to ensure electrical isolation between adjacentbundles.

Thus, the present invention includes the formation of NTs, designed andfabricated in such a way as to serve the purpose of a resilient,electrical contactor for the purpose of testing or burn-in of anelectrical device, such as an IC. NT-based electrical contacts provideanother distinct advantage in that they have an exceptionally highthermal conductivity (K reported up to 6600 W/mK, ref. Berber et. al.),allowing the probe card to be used to conduct heat into or out of theICs at specific, locations.

One skilled in the art will recognize that the following fabricationprocesses are not intended to be exclusive, and any “combination” of anyof the disclosed steps, techniques and/or devices fall within the scopeof the present invention. One skilled in the art will also recognizethat the figures represent side, cross-sectional views of planarstructures, such as the planar structures shown isometrically in FIGS. 6and 7 (discussed above), and are not meant to limit the pattern ordimensions of the bundle and substrate structures depicted.

Example Fabrication Process Flow 1 for Fabricating an NT-Based ProbeCard, with Reference to FIGS. 1 a-o:

1. Substrate preparation.

-   -   a. If 3-dimensional arrangement of NTs is required, the        substrate surface is patterned to form a negative profile of the        desired NT profile, similar to the approach used to form a        casting mold. This 3-dimensional profile might be an array of        recessed valleys with pyramid or conical shapes or any other        desired profile. See the discussion below regarding FIGS. 3 m-o.        Here, in FIG. 1 a, substrate 102 is shown without profiling for        simplicity.    -   b. In FIG. 1 b, typically an active surface 104 is deposited        onto the substrate 102 after surface profile formation is        complete. An active surface is typically SiO2, but can have any        number of suitable materials, including but not limited to        Al2O3, SiN, SiON. This forms the chemically active layer onto        which nucleation of the NT deposition is performed.    -   c. The active layer thickness can be varied across the first        substrate to selectively control the NT growth rate, thus        selectively affecting the ultimate length of the NTs.

2. In FIG. 1 c, areas in which deposition of NTs is desired are maskedover using an appropriate photoresist pattern 106.

3. In FIG. 1 d, the active layer is etched away 108 in areas not maskedby the photoresist, leaving a pattern of remaining active-area islands110 where the NTs will be subsequently grown (FIG. 1 e). Those skilledin the art will recognize that the above is a generalization of thesteps necessary to form active areas 110, and that any other knownlithographic techniques can be used, including the above-describedtechnique of using a chemically active uniform layer, and masking areasto inhibit NT growth.

4. In FIG. 1 f, the substrate can be cleaned and placed into a ChemicalVapor Deposition (CVD) chamber, a precursor gas is flown into thechamber and the NTs 112 are grown only in the areas in which theactive-area film exists.

5. In the preferred embodiment of the process, the NTs uniquely grow inbundles 114 of independent vertical pillars which are weakly attached tothe SiO2 base films.

6. At this step we are left with a full wafer-scale array of patternedNT bundles 112, which were grown into a 3-dimensional surface patternpreviously formed into the surface of the substrate and weakly attachedto this first substrate 102.

7. In FIG. 1 g, the bundles of NTs may be joined together 116 at theupper surface defined by the confluence of the ends of the NT verticalpillars. Joining processes include but are not limited to:

-   -   i. Sputtering of metal or metal alloy layers    -   ii. Electrolytic or electroless plating of metal or metal alloys    -   iii. Molten metal capillary flow    -   iv. Branching of the NTs to form structural-molecular links or        chemical bonds between NTs    -   v. Application of a polymer layer    -   vi. Application of a tape or other temporary binder.    -   vii. Reliance on naturally occurring van der Waals attraction        forces to hold the intimately layered NT bases together

8. Once the NT bundles are suitably joined at the upper surface, anarray of NT bundles weakly attached to the first substrate 102 is readyfor the next step. Starting at FIG. 1 h, this NT array 112 (now showninverted) can undergo transfer to a second substrate 122 which will formthe base of the wafer-scale probe-card.

9. In FIG. 1 h, the second substrate 122 may first be patterned with asuitable electrical interconnect or signal routing pattern 124 designedfor a specific IC wafer, such as previously described in the Background.It is through these electrical interconnects 124 that the ICs will beactivated and tested. Electrical pad areas can be patterned on theoutermost surface which will be joined to the NT bundles, through whichan electrical connection to the NT bundles will be formed. A final stepin the preparation of the probe card base 122 is to deposit areflow-able metal solder eutectic 126 onto the electrical pad areas,which will be used to form the metallurgical bond to the NT bundles.This second substrate 122 becomes the probe card base, while the NTs 112form the vertically-compressive electrically conductive contacts betweenthe probe card and the ICs.

10. This secondary substrate 122 or probe card base (henceforth referredto as the probe card base) may have a silicon wafer, glass panel orprinted circuit board combined with a series of patterned electricalconductors and insulation layers, provided to bring the power, groundand high frequency signals into the IC wafer. This probe card base mayhave a number of desirable integrated electrical functions such as acapacitor array or resistor array as needed.

11. The NT array described above is next joined to the probe card base.The joining process involves the creation of a metallurgical bondbetween the bases of the NT bundles and the electrical pads on the probecard base.

12. In FIG. 1 i, the NT array “fabric”, while still weakly attached tothe first substrate, is aligned to the aforementioned electrical padpattern on the probe card base and pressed 128 into contact with theelectrical pads; and the first substrate 102 and probe card base 122 areclamped into a fixed and aligned position relative to each other to forma stack.

13. The stack is then reflowed at a temperature 130 above the meltingpoint of the metal solder 126 previously deposited onto the electricalpad areas of the probe card base. Once the reflow step is complete, ametallurgical bond is formed between the NT bundles and the probe cardbase electrical pads.

14. At this stage (FIG. 1 j), the NT bundles are strongly attached tothe probe card base 122 through metallurgical bonds 132 and weaklyattached to the first substrate 102.

15. In FIG. 1 k, the first substrate 102 is then removed 134, leavingthe NT bundle arrays metallurgically bonded to the second, electricallyactive substrate 122. This is made possible by strong adhesion to thesecond substrate and the weak adhesion to the first. In FIG. 11, theresulting probe card 152 is shown.

16. Any surface treatment to the NT tips can be done at this point asthe top surface of the NTs is now exposed. Treatments might includechemical activation, metal deposition, etc. For example, with referenceto FIG. 1 m, a layer of metallization 154 can be deposited (e.g.,Ni/NiCo, or Ni/Au). With reference to FIG. 1 n, lithographicallydefined, pyramid shaped caps 156 can be attached to the bundle tips. Topsurface options to cover also include: as deposited; post processedtreated to sharpen tips; prior to metallization cover option of openingends of NTs to allow contact to multiple walls; metallized with highlyconformal coating. Preferred tip metallization from: Cr, Ti, Pd, Ni, Rh,Pt, Co, NiCo, PdCo, W. With reference to FIG. 1 o, an optionalinfiltration of a strengthening material, e.g., a polymer/elastomer 158,between and/or into the bundles can be employed to address fragmentationrisk and add structural integrity. The polymer is preferably PI or PMMA.

17. The result is a high aerial density, fine-pitch, highly compliantwafer-scale probe card 152 having an array of vertically-compressible,electrically conducting NT bundles metallurgically bonded to anelectrically active probe card base.

Alternative Fabrication Process Flow 2 for Fabricating an NT-Based ProbeCard, with Reference to FIGS. 2 a-j:

1. Substrate preparation.

-   -   a. Typically an active surface is deposited onto the substrate        after surface profile formation is complete. An active surface        is typically SiO2, but may be any number of suitable materials,        including but not limited to Al2O3, SiN, SiON. This forms the        chemically active layer onto which nucleation of the NT        deposition is performed. See the discussion regarding FIGS. 3        m-o below for possible profiling. Here, in FIG. 2 a substrate        202 is shown without profiling for simplicity.    -   b. The active layer thickness can be varied across the first        substrate to selectively control the NT growth rate, thus        selectively affecting the ultimate length of the NTs.

2. The substrate may be cleaned and placed into a Chemical VaporDeposition (CVD) chamber, a precursor gas is flown into the chamber andthe NTs 212 are grown uniformly across the surface of the active firstsubstrate.

3. At this step (FIG. 2 b) we are left with a full wafer-scale array ofa uniform distribution layer 212 of un-patterned NT pillars, forming afabric weakly attached to the first substrate.

4. The upper ends of the NTs may be joined together 204 (FIG. 2 b) atthe upper surface defined by the confluence of the ends of the NTvertical pillars. Joining processes include but are not limited to:

-   -   i. Evaporation or Sputtering of metal or metal alloy layers    -   ii. Electrolytic or electroless plating of metal or metal alloys    -   iii. Molten metal capillary flow    -   iv. Branching of the NTs to form structural-molecular links or        chemical bonds between NTs    -   v. Application of a polymer layer    -   vi. Application of a tape or other temporary binder    -   vii. Reliance on naturally occurring van der Waals attraction        forces to hold the intimately layered NT bases together.

5. The NTs are suitably joined at the upper surface 204, forming afabric of NT pillars, weakly attached to the first substrate 202. ThisNT pillar fabric can now undergo transfer to a second substrate 222(FIG. 2 c) which will form the wafer-scale probe-card. (In allembodiments herein, the bundle fabric can undergo one or more transfersto one or more temporary carrying substrates, for the purposes ofadditional processing, exposure/metallization, or changing thedirection/polarity of the bundles on the final substrate.)

6. The second substrate 222 may first be patterned with a suitableelectrical interconnect or signal routing pattern 224 designed for aspecific IC wafer, such as previously described in the Backgroundsection. It is through these electrical interconnects that the ICs willbe activated and tested. Electrical pad areas are patterned on theoutermost surface which will be joined to the NT bundles, through whichan electrical connection to the NT bundles will be formed. A final step(FIG. 2 c) in the preparation of the probe card base is to deposit e.g.,a reflow-able metal solder eutectic 226 onto the electrical pad areas,which will be used to form the metallurgical bond to the NT bundles.This second substrate 222 becomes the probe card base, while the NTsform the vertically-compressive electrically conductive contacts betweenthe probe card and the ICs.

7. If a 3-dimensional arrangement of NTs is required, the electricalbond pads on the second substrate surface are patterned to form apositive profile of the desired NT profile, such as a pyramid, conicalor ziggurat shape.

8. This secondary substrate or probe card base 222 (henceforth referredto as the probe card base) may be a ceramic wafer, silicon wafer, glasspanel or printed circuit board combined with a series of patternedelectrical conductors and insulation layers, provided to bring thepower, ground and high frequency signals into the IC wafer. The probecard base may either be wafer scale (to create a wafer scale probe card)or scaled for smaller for single- or multi-field or single- or multi-dielevel probing. This probe card base may have a number of desirableintegrated electrical functions such as a capacitor array or resistorarray as needed.

9. The NT array described above is next joined to the probe card base.The joining process involves the creation of a metallurgical bondbetween the bases of the NT bundles 212 and the electrical pads 224 onthe probe card base.

10. The NT array “fabric”, while still weakly attached to the firstsubstrate (now shown inverted), is aligned (FIG. 2 d) to theaforementioned electrical pad pattern on the probe card base and pressed228 into contact with the electrical pad areas; and the first substrate202 and probe card base 222 are clamped 228 into a fixed and alignedposition relative to each other to form a stack.

11. The stack is then reflowed at a temperature 230 above the meltingpoint of the metal solder 226 previously deposited onto the electricalpads of the probe card base. Once the reflow step is complete, ametallurgical bond is formed between the NT bundles 212 and the probecard base electrical pad areas.

12. At this stage, the NT bundles are strongly attached to the probecard base 222 through metallurgical bonds and weakly attached to thefirst substrate 202.

13. The first substrate is then removed 234 (FIG. 2 e), leaving the NTpillars in arrays of small groups or bundles 238 metallurgically bondedto the second, electrically active substrate 222. This is made possibledue to the strong adhesion to the second substrate 222 and the weakadhesion to the first 202. The NT pillars are extracted from the uniformfabric of NT pillars on the first substrate only where a metallurgicalbond was formed between the NT pillars and the solder-coated electricalbond pad areas on the second substrate. Surrounding the solder-coatedbond-pads, there was no adhesion to the NT pillars (FIG. 2 f), thus theNT pillars located over areas in which there was no bond pad 236 areleft behind, with the rest of the NT pillar fabric 238 deposited on thesecond substrate 222.

14. The NT pillars 238 that were metallurgically bonded to the secondsubstrate (FIG. 2 f) are extracted from the first substrate to form anarray of NT pillar bundles. These NT pillar bundles 238 form theelectrical probe contacts on the second electrically active probe cardbase. In FIG. 2 g, the resulting probe card 252 is shown.

15. Any surface treatment to the NT tips can be done at this point asthe top surface of the NTs is now exposed. Treatments might includechemical activation, metal deposition, etc. For example, with referenceto FIG. 2 h, a layer of metallization 254 can be deposited (e.g.,Ni/NiCo, or Ni/Au). With reference to FIG. 2 i, lithographicallydefined, pyramid shaped caps 256 can be attached to the bundle tips. Topsurface options to cover also include: as deposited; post processedtreated to sharpen tips; prior to metallization cover option of openingends of NTs to allow contact to multiple walls; metallized with highlyconformal coating. Preferred tip metallization from: Cr, Ti, Pd, Ni, Rh,Pt, Co, NiCo, PdCo, W. With reference to FIG. 1 j, an optionalinfiltration of a strengthening material, e.g., a polymer/elastomer 258,between bundles can be employed to address fragmentation risk and addstructural integrity. The polymer is preferably PI or PMMA.

16. The result is a high aerial density, fine-pitch, highly compliantwafer-scale probe card 252 (FIG. 2 j) having an array ofvertically-compressible, electrically conducting NT bundlesmetallurgically bonded to an electrically active probe card base.

Alternative Fabrication Process Flow 3 for Fabricating an NT-Based ProbeCard, with Reference to FIGS. 3 a-l:

1. Substrate preparation.

-   -   a. Typically an active surface is deposited onto the substrate        after surface profile formation is complete. An active surface        is typically SiO2, but may be any number of suitable materials,        including but not limited to Al2O3, SiN, SiON, NiCr based or        other metal alloys. This forms the chemically active layer onto        which nucleation of the NT deposition is performed.    -   b. The active layer thickness can be varied across the first        substrate to selectively control the NT growth rate, thus        selectively affecting the ultimate length of the NTs.

2. The substrate may be cleaned and placed into a Chemical VaporDeposition (CVD) chamber, a precursor gas is flown into the chamber andthe NTs 312 are grown uniformly across the surface of the active firstsubstrate 302, as shown in FIG. 3 a.

3. At this step (FIG. 3 a) we are left with a full wafer-scale array ofa uniform distribution layer of un-patterned NT pillars, forming afabric 312 weakly attached to the first substrate.

4. If 3-dimensional arrangement of NTs is required, either on the upperor lower surface of the NT fabric, laser ablation is carried out todefine the desired NT profile. Shapes such as a pyramid, conical orziggurat shape are examples of potentially desirable profiles.

5. The bundles of NTs may be joined together at the upper surfacedefined by the confluence of the ends of the NT vertical pillars.Joining processes are defined above. Alternatively the NTs may be leftas deposited.

6. In FIG. 3 b, the substrate 302 supporting the NTs can be placed intoa wet bath to remove the NT film or fabric 314 from the underlayer forexample by wet etching the SiO2 in HF or other suitable etchant.

7. The thin NT ‘fabric’ 314 (FIG. 3 c) may be rinsed and dried andsurface pretreated (for example by plasma oxidation or surface laserablation) on either side alternately or on both sides simultaneously.Two layers of carbon structures are visible in this figure (and in allother figures herein)—a base “matted” layer and a finer layer ofnanotube growth. An option to all embodiments disclosed herein is theremoval of either layer (for example, by etching) if the applicationwarrants. This removal can leave either the “fine” nanotube layer forfine-grain connections, or the coarser layer, as required.

8. In FIG. 3 d, the fabric is metallized 304 on either side alternatelyor on both sides simultaneously using processes including but notlimited to:

i. Evaporation or Sputtering of metal or metal alloy layers

ii. Liquid chemical sensitization, followed by chemical activation

iii. Electrolytic or electroless plating of metal or metal alloys

iv. Molten metal capillary flow

9. The fabric can undergo transfer to a second substrate which will formthe wafer-scale probe-card. This may be a wafer scale transfer processor sectionalized such that the sections are independent and ‘tiled’ ontothe wafer to provide a full wafer surface ‘tiled’ coating, as discussedfurther below.

10. The probe card base may either be wafer scale (to create a waferscale probe card) or scaled for smaller for single- or multi-field orsingle- or multi-die level probing. With reference to FIG. 3 e, thissecond substrate 322 must first be patterned with a suitable electricalinterconnect or signal routing pattern 324 designed for a specific ICwafer, such as previously described in the Background section. It isthrough these electrical interconnects that the ICs will be activatedand tested. Electrical pad areas are patterned on the outermost surfacewhich will be joined to the NT bundles, through which an electricalconnection to the NT bundles will be formed. Fiducials at the edge ofthe second substrate provide an alignment reference pattern forsubsequent processing steps. A final step in the preparation of theprobe card base is to deposit a reflow-able metal solder eutectic 326onto the electrical pads of the electrically active probe card base,which will be used to form the metallurgical bond to the NT fabric. Thissecond substrate 322 becomes the probe card base, while the NTs form thevertically-compressive electrically conductive contacts between theprobe card and the ICs. It is preferable to maintain the orientation ofthe deposited top and bottom surfaces of the NT fabric after transfer tothe second substrate. This orientation selection allows the desired basecompressive characteristic to be maintained.

11. This secondary substrate or probe card base (henceforth referred toas the probe card base) may be a ceramic wafer, silicon wafer, glasspanel or printed circuit board combined with a series of patternedelectrical conductors and insulation layers, provided to bring thepower, ground and high frequency signals into the IC wafer. This probecard base may have a number of desirable integrated electrical functionssuch as a capacitor array or resistor array as needed.

12. The NT fabric described above is next joined to the probe card base.With reference to FIG. 3 f (and as discussed above), the joining processmay involve the creation of a metallurgical bond between the bases ofthe NT bundles and the electrical pads on the probe card base, using acompressive force 328 over fabric 314.

13. The stack is then reflowed at a temperature 330 above the meltingpoint of the metal solder 326 previously deposited onto the electricalpads of the probe card base. Once the reflow step is complete, ametallurgical bond is formed between the NT fabric and the probe cardbase electrical pads. The NT fabric may be placed under a compressiveload during the reflow process to assist in the creation of themetallurgical bond at the interface of the NT column and the metal padof the probe card base.

14. At this stage (FIG. 3 g), the NT fabric is strongly attached to theprobe card base through metallurgical contact, forming the probe card332.

15. In FIG. 3 h, using the fiducials located at the edges of the probecard base for alignment, any ablation technique, e.g., laser ablation334 can be used to ablate the NTs and metal layers to defineelectrically insulating regions surrounding the electrically conductiveNT pillars. The result is to create NT bundles which are dimensionallyaligned and patterned to match to the wafer I/O or Power/Ground pads.The NT pillars are patterned using the laser ablation technique tocreate probe bundles or probe arrays which match a semiconductor deviceor a full wafer of semiconductor devices.

16. The result (FIG. 3 i) is a high aerial density, fine-pitch, highlycompliant wafer-scale probe card 352 having an array ofvertically-compressible, electrically conducting NT bundlesmetallurgically bonded to an electrically active probe card base.

17. As discussed above, and with reference to FIGS. 3 j, 3 k and 3 l;the tips of the bundles can be metallized 354; formed into arbitraryshapes 356; and/or infiltrated with a strengthening material 358 (e.g.,polymer or elastomer).

18. Low contact resistance can be achieved by forming the NT tips into amicro-indenter of a design which can effectively score or penetrate asurface. Such shape may be diamond-shaped, conical or any number ofother abrasive profiles. Such shapes can also be useful for a range ofother purposes. This can be achieved by first modifying the surface of asubstrate to form a 3-dimensional mold pattern, which will define thefinished 3-D profile of the NT array which is deposited onto thismodified substrate. In FIG. 3 m, an alternative, patterned substrate302′ is shown as a starting point for growing NTs 312′. “Negative”pyramid shapes are formed into the substrate 302′ resulting in“positive” pyramid shapes formed during growth of the NT fabric 314′(FIG. 3 n). This “positive” pyramid shape temporarily compresses flat asthe NT fabric is compressed during further processing steps. When thecompressive force is removed, the NTs expand and the “positive” pyramidshape recovers through the free top surface of the NT fabric. After theprocessing discussed above, a probe card 352′ results, having thebundles profiled as a pyramid, as shown in FIG. 3 o. These pyramidshaped tips on the NT probe bundles also provide a way to create anablative probe tip, used to break through the surface oxide of a deviceunder test's metal electrical contact pads. This structure also providesprogressively increasing contact force, center to edge, as the bundle ofredundant vertically-compressible nanotube contacts are compressed intothe pad on the device under test. The profile of varying height, alsoallows a varying degree of contact between the bundle and the deviceunder test depending on the amount of compressive force applied duringtest. This option is available for any of the process flows discussedherein.

Alternative Fabrication Process Flow 4 for Fabricating an NT-Based ProbeCard, with Reference to FIGS. 4 a-n:

1. Substrate preparation.

-   -   a. Typically an active surface is deposited onto the substrate        after surface profile formation is complete. An active surface        is typically SiO2, but may be any number of suitable materials,        including but not limited to Al2O3, SiN, SiON, or certain metal        alloys. This forms the chemically active layer onto which        nucleation of the NT deposition is performed.    -   b. The active layer thickness can be varied across the first        substrate to selectively control the NT growth rate, thus        selectively affecting the ultimate length of the NTs.

2. The substrate is cleaned and placed into a Chemical Vapor Deposition(CVD) chamber, a precursor gas is flown into the chamber and the NTs aregrown uniformly across the surface of the active first substrate.

3. At this step (FIG. 4 a) we are left with a full wafer-scale array ofa uniform distribution layer of un-patterned NT pillars 412, forming afabric weakly attached to the first substrate 402.

4. If 3-dimensional arrangement of NTs is required, laser ablation iscarried out to define the desired NT profile, such as a pyramid, conicalor ziggurat shape.

5. The bundles of NTs may be joined together at the upper surfacedefined by the confluence of the ends of the NT vertical pillars.Joining processes are defined above. Alternatively the NTs may be leftas deposited.

6. In FIG. 4 b, the wafer supporting the NTs is placed into a wet bathto remove the NT film or fabric 414 from the substrate 402 for exampleby wet etching the SiO2 in KOH.

7. The thin NT ‘fabric’ 414 (FIG. 4 c) is dried and surface pretreated(for example by plasma oxidation) on either side alternately or on bothsides simultaneously.

8. In FIG. 4 d, the fabric 414 may be metallized 404 on either sidealternately or on both sides simultaneously using processes includingbut not limited to:

i. Evaporation or Sputtering of metal or metal alloy layers

ii. Electrolytic or electroless plating of metal or metal alloys

iii. Molten metal capillary flow

9. The fabric can undergo transfer to a second substrate which will formthe wafer-scale probe-card. This may be a wafer scale transfer processor sectionalized such that the sections are independent and ‘tiled’ ontothe wafer to provide a full wafer surface ‘tiled’ coating, as discussedfurther below.

10. The probe card base may either be wafer scale (to create a waferscale probe card) or scaled for smaller for single- or multi-field orsingle- or multi-die level probing. In FIG. 4 e, this second substratemust first be patterned with a suitable electrical interconnect orsignal routing pattern 424 designed for a specific IC wafer, such aspreviously described in the Background section. It is through theseelectrical interconnects that the ICs will be activated and tested.Electrical pad areas are patterned on the outermost surface which willbe joined to the NT bundles, through which an electrical connection tothe NT bundles will be formed. Fiducials at the edge of the secondsubstrate provide alignment for subsequent processing. A final step inthe preparation of the probe card base is to deposit a reflow-able metalsolder eutectic 426 onto the electrical pads, which will be used to formthe metallurgical bond to the NT fabric. This second substrate becomesthe probe card base, while the NTs form the vertically-compressiveelectrically conductive contacts between the probe card and the ICs. Itis preferable to maintain the orientation of the deposited top andbottom surfaces of the NT fabric after transfer to the second substrate.This orientation selection allows the desired base compressivecharacteristic to be maintained. Solder bumps 427 can also be formed onthe interconnect structure, to facilitate further connection to anunderlying support layer (discussed further below).

11. This secondary substrate or probe card base (henceforth referred toas the probe card base) may be a ceramic wafer, silicon wafer, glasspanel or printed circuit board combined with a series of patternedelectrical conductors and insulation layers, provided to bring thepower, ground and high frequency signals into the IC wafer. This probecard base may have a number of desirable integrated electrical functionssuch as a capacitor array or resistor array as needed.

12. The NT fabric described above is next joined to the probe card base.In this embodiment, the probe card base is either field or die level(single or multi). The joining process involves the creation of ametallurgical bond between the bases of the NT bundles and theelectrical pads on the probe card base.

13. In FIG. 4 f the fabric is subjected to a compressive force 428, andthe stack is then reflowed at a temperature 430 above the melting pointof the metal solder previously deposited onto the electrical pads of theprobe card base. Once the reflow step is complete, a metallurgical bondis formed between the NT fabric and the probe card base electrical pads.

14. At this stage (FIG. 4 g), the NT fabric is strongly attached to theprobe card base through metallurgical contact, forming an integratedprobe card 432.

15. In FIG. 4 h, using the fiducials located at the edges of the probecard base for alignment, any ablation technique, e.g., laser ablation434 can be used to ablate the NTs and metal layers to defineelectrically insulating regions surrounding the electrically conductiveNT pillars. The result is to create NT bundles which are dimensionallyaligned and patterned to match to the wafer I/O or Power/Ground pads.The NT pillars are patterned using the laser ablation technique tocreate probe bundles or probe arrays which match a semiconductor deviceor a full wafer of semiconductor devices.

16. In FIG. 4 i, the result is a high aerial density, fine-pitch, highlycompliant die or field scale probe card 452 having an array ofvertically-compressible, electrically conducting NT bundlesmetallurgically bonded to an electrically active probe card base. Thissub-component is henceforth referred to as a (NT probe tile). 17. Asdiscussed above, and with reference to FIGS. 4 j, 4 k and 4 l; the tipsof the bundles can be metallized 454; formed into arbitrary shapes 456;and/or infiltrated with a strengthening material 458 (e.g., polymer orelastomer).

17. To support a larger scale, with reference to FIG. 4 m, a furtherlarger, third substrate 460 may first be patterned with a suitableelectrical interconnect or signal routing pattern 462 designed for aspecific IC wafer, such as previously described in the Backgroundsection. It is through these electrical interconnects that the ICs willbe activated and tested. Electrical pads are patterned on the outermostsurface which will be joined to the Nt-Probe Tile, providing a die orfield scale probe card, which supports the NT bundles, through which anelectrical connection to the NT bundles will be formed. The next step isthe preparation of the probe card base is to deposit a reflow-able metalsolder eutectic onto the electrical pads, which will be used to form themetallurgical bond to the NT-Probe Tile die or field level probe card.Multiple NT-Probe Tiles (452 a-c), providing die or field level probepatterns are ‘tiled’ onto the larger probed card base, using theaforementioned solder bumps 427. This third substrate becomes the largeror wafer scale probe card base, while the NTs form thevertically-compressive electrically conductive contacts between theprobe card and the ICs through the die or field level probe card.

18. This third substrate 460 or probe card base (henceforth referred toas the probe card base) may be a ceramic wafer, silicon wafer, glasspanel or printed circuit board combined with a series of patternedelectrical conductors and insulation layers, provided to bring thepower, ground and high frequency signals into the IC wafer. This probecard base may have a number of desirable integrated electrical functionssuch as a capacitor array or resistor array as needed.

19. The tiled array of die 452 a-c or field level probe cards are nextjoined to the probe card base. The joining process involves the creationof a metallurgical bond between the bases of the NT array supportingcard and the electrical pads on the final probe card base.

20. A compressive force is aligned and applied 466 to the tiles 452 a-c,and the stack is then reflowed at a temperature 464 above the meltingpoint of the metal solder previously deposited onto the electrical padsof the probe card base. Once the reflow step is complete, ametallurgical bond is formed between the two probe card contacts.

21. At this stage (FIG. 4 n), the NT fabric is strongly attached to theprobe card base through metallurgical contact which in turn is attachedto a larger scale probe card 470, which can be used to test a largescale wafer or other device under test 480, when the relevant contactpads 482 of the device are aligned with, and contact, the bundles 472.

Example Fabrication Process Flow 5 for Fabricating a “Universal ProbeInterface,” with Reference to FIGS. 8 a-j:

As discussed in the above process flows, additional radial insulationcan be provided by adding an elastic insulator matrix around thevertically-conducting NT pillars or bundles. It is desirable toeliminate the need to pattern the NTs into localized (i.e., custom),isolated bundles in order to create isolated electrical contacts to theIC bond pads. A fully insulated, non-patterned version of the probecontact array could form the basis for a Universal Interface Probe(UPI), in which the probe contact layer is applied to an electricallycustom-patterned probe card base which employs specific contact padsthat align to a specific wafer IC bond pad pattern. The UPI would beused to provide a compliant electrical contact layer between the waferand the probe card. This configuration would allow the probe card to beseparated functionally into two sub-components: a more-costly butdurable electrically patterned probe card base, and a less-costly butmore fragile contact probe layer. Thus the UPI provides the function ofa low cost, replaceable electrical contact fabric, which can be eitherpermanently or temporarily joined to the electrically active probe cardbase to make a two-component probe card. This segregates the majority ofthe cost of the probe card into the durable electrically active probecard base sub-component while potentially using the UPI as a disposable,replaceable electrical contact film. An exemplary formation process isas follows:

1. Substrate preparation.

-   -   a. If 3-dimensional arrangement of NTs is required, the        substrate surface is patterned to form a negative profile of the        desired NT profile, similar to the approach used to form a        casting mold. This 3-dimensional profile might be an array of        recessed valleys with pyramid or conical shapes or any other        desired profile. Here, in FIG. 8 a, substrate 802 is shown        without profiling for simplicity.    -   b. In FIG. 8 b, typically an active surface 804 is deposited        onto the substrate 802 after surface profile formation is        complete. An active surface is typically SiO2, but can be any        number of suitable materials, including but not limited to        Al2O3, SiN, SiON. This forms the chemically active layer onto        which nucleation of the NT deposition is performed.    -   c. The active layer thickness can be varied across the first        substrate to selectively control the NT growth rate, thus        selectively affecting the ultimate length of the NTs.

2. In FIG. 8 c, areas in which deposition of NTs is desired are maskedover using an appropriate photoresist pattern 806.

3. In FIG. 8 d, the active layer is etched away 808 in areas not maskedby the photoresist, leaving a “universal” pattern of remainingactive-area islands 810 where the NTs will be subsequently grown (FIG. 8e). Those skilled in the art will recognize that the above is ageneralization of the steps necessary to form active areas 810, and thatany other known lithographic techniques can be used, including theabove-described technique of using a chemically active uniform layer,and masking areas to inhibit NT growth.

4. In FIG. 8 f, the substrate can be cleaned and placed into a ChemicalVapor Deposition (CVD) chamber, a precursor gas is flown into thechamber and the NTs 812 are grown only in the areas in which theactive-area film exists.

5. In the preferred embodiment of the process, the NTs uniquely grow ina “universal” pattern of bundles 814 of independent vertical pillarswhich are weakly attached to the SiO2 base films.

6. At this step we are left with a full wafer-scale array of a universalpattern 812 of bundles 814, which were grown into a 3-dimensionalsurface universal pattern previously formed into the surface of thesubstrate, and weakly attached to this first substrate 802.

7. In FIG. 8 g, the bundles of NTs may be joined together 816 at theupper surface defined by the confluence of the ends of the NT verticalpillars. Joining processes include but are not limited to:

-   -   i. Sputtering of metal or metal alloy layers    -   ii. Electrolytic or electroless plating of metal or metal alloys    -   iii. Molten metal capillary flow    -   iv. Branching of the NTs to form structural-molecular links or        chemical bonds between NTs    -   v. Application of a polymer layer    -   vi. Application of a tape or other temporary binder.    -   vii. Reliance on naturally occurring van der Waals attraction        forces to hold the intimately layered NT bases together

8. Also with reference to FIG. 8 g, an infiltration of apolymer/elastomer 858 between bundles can be employed to addressfragmentation risk and add structural integrity. The polymer ispreferably PI or PMMA. The resulting upper layer 860 now includes themetallized bundles surrounded by a supporting material.

9. In FIG. 8 h, the wafer supporting the NTs is placed into a wet bathto remove the NT film or fabric 860 from the substrate 802 for exampleby wet etching the SiO2 in KOH.

10. The thin NT ‘fabric’ 860 can be dried and surface pretreated (forexample by plasma oxidation) on either side alternately or on both sidessimultaneously.

11. The resulting configuration (FIG. 8 i) shows the probe cardseparated functionally into two sub-components: (1) the more-costly butdurable electrically patterned probe card base 822 having lower contactbumps or pads 827 supporting connection of test apparatus (not shown) toa custom-patterned interconnect structure 824; and (2) a less-costly,disposable, but more fragile universal probe interface (UPI) layer 860,which serves as the compressible connection layer paced in between theupper bumps 826 on probe card base 822 and a sample under test to bealigned and placed above the layer (not shown). This layer may not becustom-patterned, and any bundles which do not contact bumps 826 simplygo un-used. Thus the layer 860 provides the function of a low cost,replaceable electrical contact fabric, which can be either permanentlyor temporarily joined to the electrically active probe card base to makea two-component probe card. This segregates the majority of the cost ofthe probe card into the durable electrically active, custom patterned,probe card base 822 sub-component while potentially using the UPI layeras a disposable, replaceable electrical contact film 860. An exemplary,polymer-encapsulated UPI layer 860 is shown in the photograph of FIG. 8j—note the regular, non-custom pattern of bundles in the layer.

12. As discussed in the above process flows, the bases and/or tips ofthe bundles on layer 860 can be metallized and/or formed into arbitraryshapes.

Those skilled in the art will recognize that the layer 860 (with acustom or non-custom pattern of bundles) can alternatively be fixedly,permanently attached to the probe card base, following e.g., processflow steps such as those of FIG. 3 f-3 l or 4 f-4 i above (the bundlesbeing pre-formed and therefore not requiring the disclosed laserablation step disclosed in those steps).

Flexible Substrate Embodiment:

In another embodiment of the invention, and with reference to FIG. 9,the vertically compressive probe elements can be attached to a flexibleor inflatable substrate 960 through which variable compressive force canbe applied to allow varying degrees of probe contact force across thearea of an IC or across the area of a wafer. This allows varying rangeof compliance across the area of an IC or across the area of a waferunder test. In a related embodiment, the vertically compressive probeelements are attached to a segmented inflatable multi-chamber inflatableor expandable substrate through which incrementally variable compressiveforce can be applied to allow varying degrees of probe contact force ordegree of compliance across the area of an IC or across the area of awafer. And in another related embodiment, the probe card can beconstructed with a combination of the vertically compressive,anisotropic-electrically conductive NT probe elements, the electricallyactive probe card base and the variable compressive multi-chamberinflatable or expandable substrate test head used with Automatic TestEquipment (ATE) for the purpose of electrical testing and or burn-in ofIC wafers or electrical device panels.

Key Advantages of the Inventions Described Herein:

A probe card that enables cost-effective full wafer-scale or panel-scaleparallel probing, often referred to as “Wafer Level Burn-In and Test”.This is made possible through the following characteristics:

Highly compliant NT contact probes, capable of up to 90% compressionwithout mechanical or electrical failure. The allows use of highlycompliant NTs to form a probe card with compliance to accommodatevariation in wafer flatness or probe length.

Low inductance: NTs with relatively short length can provide a highlevel of conformity to wafers which either have a high degree oftopology or variation in wafer flatness, due to the highcompliance/compression ratio of the NTs. This aspect makes NT contactprobes particularly suitable for High Frequency (HF) applications.

Wafer flatness variation or surface topology can be compensated forthrough the unique features of the NT probe-card.

-   -   a. NTs can be deposited directly onto a compliant substrate to        form a probe card in which compressive force can be applied        through the substrate to the contact probes.    -   b. The compliant substrate can be constructed to form one wall        of a pressure chamber, which would expand under pressure thus        applying continuous static force through the compliant substrate        to the contact probes and wafer pads.    -   c. Aerial force control can be achieved by segmenting the single        pressure chamber into an array of individually inflatable        pressure chambers which are used to individually actuate        segregated areas of the probe card.

Can be applied in conjunction with compliant micro springs or MEMSdevices to provide additional compliance or to provide contactredundancy.

Low total force per contact point resulting in minimal damage to low-kdielectric layers below the IC pad.

Low total force per contact results in minimal damage or indentationinto the IC pad.

Extraordinarily small contact tip diameter enables thousands of NTpillars to fit within the topology of the metal grain structure of theIC bond pads. This increases the total electrical contact area availablebetween the probe card and IC bond pad.

Extraordinarily high force per area (Kg/m̂2), due to the nano-meter scalecontact tip diameter, enabling high force concentration needed to breakthrough a native oxide layer on an IC bond pad.

Highly Redundant contacts per IC pad (10,000's per pad), ensuringmultiple low contact resistance contacts are being made to the IC BondPad.

The capability to create more than 4, electrically isolated contactswithin a NT bundle, which can make contact to a single IC bond pad,which enables the formation of 4-point Kelvin contact structures whichcan be used for in-situ contact verification and contact resistancecancellation.

Ultra-fine pitch capability (as low as several microns) makingthrough-wafer-interconnect (TWI) probing possible. This is an enablingfeature for some 3-dimensional semiconductor wafer integrationapplications.

Anisotropic conduction ensures high electrical isolation between pads.

Laser ablation techniques can be used to selectively remove rows orcolumns of NTs from a field of NTs provides an additional method andlevel of electrical isolation between regions or bundles of NT probes.

Extremely low electrical resistance in the axial path, lowself-capacitance as well as low mutual and self-inductance, making theNT probe card ideal for high frequency applications.

Can be combined with metal-abrasive matrix composites at the tip of theNT to minimize contract resistance to an IC Pad.

-   -   a. The metal-abrasive matrix can be applied to the tip of the NT        to provide a hard, wear resistant coating. The embedded abrasive        matrix is used to break through metal-oxides, debris or other        insulative films that may be present on the surface of a IC bond        pad.    -   b. The metal matrix composite material can be selectively        deposited onto the tips of the NTs through electrolytic plating        or other processes.

Alternatively, high hardness metals or metal alloys can be applied in asimilar way to achieve low resistance contacts. These materials achieveconsistently low contact resistance by avoiding the pick-up of foreignmaterials or contaminants from the IC pad through the selection ofhighly inert, platinum-group metals or alloys, such as PdCo, orelectrically conductive, hard metal nitrides such as TiN, TaN, etc.

NTs provide high thermal conductivity in the axial direction, similar toits electrical characteristics—thus enabling the probe card to transferheat into or out of the IC when in contact with the IC.

NTs are produced en-masse, using established Semiconductor Fabricationtechnologies, such as, but not limited to Chemical Vapor Deposition andphoto-lithography, thus offer advantages in the economy of scaleestablished in the industry. This is in contrast to the precisemicro-machining, multi-step-electro-deposition or micro assemblytechniques used in the fabrication of the prior art.

Inherent planarity of the NT tips, resulting from the controlled growthrate exhibited during the Chemical Vapor Deposition used in thefabrication of NTs.

Moreover, planarity can be further enhanced through a transfer processin which the array of fully grown NTs are joined at the NT tips to asecond substrate and released from the first substrate at the base ofthe NTs. Since the NTs were originally grown from the planar substratesurface, the NTs will match the planarity of the first substrate.

The inventive concepts of this disclosure include, but are not limitedto the following:

An integrated Probe Card having Nano-Tubes (NT)s or similar classes ofthree-dimensional electrically conductive molecules, forming theelectrically conductive vertically-compressive electrical probecontacts, combined with an electrically active, patterned probe cardbase.

Temporary electrical contacts formed through the use of NanoTubes (NT)s,or similar classes of long-chain, three-dimensional electricallyconductive molecules, such as, but not limited to: Carbon NanoTubes(CNT), Germanium NanoTubes (GeNT) or other.

A structure and process to fabricate redundant vertically-compressibleelectrically-conductive contacts formed from microscopicvertically-compressible pillars using NTs or other similar 3-dimensionalelectrically conductive long-chain molecules.

A structure and process to fabricate low inductance electricalinterconnects using vertically-compressible electrically-conductivecontacts, formed from microscopic vertically-compressible pillars usingNTs or other similar 3-dimensional molecules.

A structure and process in which an array of vertically-compressible,electrically conductive NT pillars is deposited using a chemical vapordeposition process resulting in highly uniform NT pillar height,resulting in uniform compression force and consequently, uniformelectrical contact resistance.

A structure and process to modify the electrical and mechanicalproperties of the tip of the vertically-compressible NT pillar throughdeposition of a combination other materials such as metals, metal-alloysor metal-ceramic-composites (MMC)s, onto the tips and/or bases of thevertically-compressible pillars.

A structure and process in which vertically-compressible NT pillarscombined with ablative materials such as metals, metal-alloys ormetal-ceramic-composites (MMC)s, onto the tips and/or bases of thevertically-compressible pillars is applied as an electrically conductiveprobe designed to penetrate through a metallic surface oxide layer of anIC bond pad.

A structure and process to modify the electrical or mechanicalproperties of the tip of the vertically-compressible NT pillar throughchemical reaction with other materials such as organic ororgano-metallic pre-cursors or catalysts.

A structure and process to modify the morphological properties of thevertically-compressible NT pillar through chemical reaction with othermaterials such as but not limited to organic or organo-metallicpre-cursors or catalysts for the purpose of fabricating an electricaldevice probe card.

A structure and process to modify specifically, the High Frequency (HF)electrical signal propagation characteristics of the NT probe contactsthrough modification of the NT deposition process or through chemicaldoping or secondary thin film deposition onto the NT pillars for thepurpose of tuning the performance of an integrated probe card.

A structure and process (ABOVE) to modify specifically, the HighFrequency (HF) electrical signal propagation characteristics of the NTprobe contacts through modification of the NT deposition processresulting in a change in density or the number of concentric wallscomprising the NT pillars for the purpose of tuning the HF electricalsignal performance of an integrated probe card.

A structure and process to selectively tune the compressive spring rateof vertically-compressible NT pillars through chemical reaction withother materials such as but not limited to organic or organo-metallicpre-cursors or catalysts for the purpose of fabricating an electricalprobe card.

A structure and process to selectively tune the compressive spring rateof vertically-compressible NT pillars through chemical reaction withother materials such as but not limited to organic or organo-metallicpre-cursors or catalysts for the purpose of fabricating an electricalprobe card.

A structure and process to selectively tune the compressive spring rateand compression morphology of vertically-compressible NT pillars throughprocess changes including, but not limited to: Concentration, Flow-Rate,Chemical Composition and Temperature of a gaseous-phasecatalytically-activated chemical reaction. This chemical reaction can beadjusted through the in-situ introduction of other materials such as butnot limited to organic or organo-metallic pre-cursors or catalysts.

A structure and process to selectively tune the compressive spring rateand compression morphology of vertically-compressible NT pillars throughprocess variation in the first substrate including, but not limited to:Catalyst Concentration, Chemical Composition and Temperature of aSolid-Phase Catalytically-Activated chemical reaction. This chemicalreaction can be adjusted through the in-situ introduction of othermaterials such as but not limited to organic or organo-metallicpre-cursors or catalysts.

A structure and process to modify the compressive spring rate ofvertically-compressible NT pillars through cross-branching of the NTpillars during or after the initial deposition process.

A structure and process to modify the compressive spring rate ofvertically-compressible NT pillars in which the cross-branchingstructures are inter-disposed within the NT pillar matrix.

A structure and process to modify the compressive spring rate ofvertically-compressible NT pillars by loading the interstitial spacebetween the NT pillars with other materials, such as but not limited to:polymers, glass fibers, or metals, during or after the initialdeposition process.

A structure and process to fabricate or deposit a specifically definedpattern of NT probe contacts on a first substrate.

A structure and process of claim (ABOVE) to selectively etch achemically-active substrate or catalytic layer on a substrate to form adefined pattern of active and non active locations on a substrate forthe purpose of selective growth of NTs or other 3-dimensional,electrically conductive molecules on the substrate for the purpose offabricating an specific pattern of NTs or other 3-dimensional ,electrically conductive and compressive pillars for the purpose offabricating an electrical probe card base or any other electricallyactive contact array. This chemically active base includes, but is notlimited to a layer containing SiO2, Al2O3, SiN, SiON, FeO2 or any othermaterials capable of enabling or catalyzing the growth of 3-dimensionalmolecules.

A structure and process in which a surface of a first substrate isformed into a 3-dimensional profiled pattern used as a mold or mandrelinto which the deposition of NT pillars results in the formation of a3-dimensional profile of NT pillars once the pillars are transferred toa second substrate.

A structure and process in which an array of bundles of NT pillars aredeposited onto a first substrate and joined to an electrically activesecond substrate, forming electrically conductive metallurgical bondsbetween the NTs and the second substrate.

A structure and process in which the NTs are weakly attached to thefirst substrate is during deposition of the NTs, allowing the array ofdeposited NT-bundles to be strongly bonded to a second substrate andsubsequently separated from the first substrate, thus undergoing atransfer to the second substrate.

The structure of claim (ABOVE) in which the electrically active secondsubstrate is a probe card base used in conjunction with Automatic TestEquipment (ATE) for the routing of electrical power, ground and signalsinto a IC wafer or a panel of electrical devices.

The structure of claim (ABOVE) in which the combination of thetransferred NT bundle array and second substrate form a verticallycompressive, electrically conductive IC-wafer probe card.

A structure and process to fabricate a 3-dimensional profile shape ofindividual, redundant vertically-compressible electrical contactsdefined by the 3-dimensional outline of the tips of a bundle of contactpillars, wherein the pillars are deposited in progressively increasinglength from edge to center of the NT bundle. The progression ofincreasing lengths can follow a 3-dimensional profile outline of anydesired shape, such as a pyramid, ziggurat, conical, or other shape.

A structure and process to form a bundle or array of redundantvertically-compressible electrical contact pillars in such a way as tomake progressively increasing number of contacts with an electrical bondpad, as the bundle of redundant vertically-compressible pillar contactsare compressed into the surface defined by the electrical device or ICbond pad.

A structure and process to form a bundle or array of redundantvertically-compressible electrical contact pillars in such a way as tomake progressively increasing contact force, center to edge of the ICbond pad as the bundle of redundant vertically-compressible pillarcontacts are compressed into the surface defined by the electricaldevice bond pad.

A structure and process to form an array of bundles of redundantvertically-compressible electrical contacts in such a way as to makeeach bundle make progressively increasing number of contacts with amultitude of electrical bond pads located within an electrical device,such as a IC wafer, as the array of bundles of redundantvertically-compressible pillar contacts are compressed into the surfacedefined by the electrical device.

A structure and process to join a bundle of vertically-compressiblecontacts together, into a single continuous contact surface or, asrequired, a single micro-indenter profile, having a unitized contactpoint supported by an array or bundle of fully individual and redundantvertically-compressible NT pillars. The micro indenter profile may be ofany 3-dimensional shape, such as a pyramid, ziggurat, cone, ziggurat,blade or any other.

A structure and process in which vertically-compressible NT pillarscombined with ablative materials such as metals, metal-alloys ormetal-ceramic-composites (MMC)s, onto the tips and/or bases of thevertically-compressible pillars is applied as an electrically conductiveprobe designed to penetrate through a metallic surface oxide layer of anIC bond pad.

A structure and process to hold a bundle or array of bundles ofvertically-compressible NT pillars together for the purpose of removingthe NT array from a first substrate and transferring the bundle or arrayof NTs en-masse to a secondary substrate.

A method of forming a 4-point probe contact, which can be containedwithin a single IC pad, known in the industry as a Kelvin contactstructure, used in the industry to measure and cancel the effects ofcontact resistance on non-redundant electrical contacts.

A structure and process to form a Kelvin contact structure within asingle electrical contact pad.

A structure and process to form a Kelvin contact structure within aseries of electrical contact pads, such as in the case of power andground planes within an electrical device.

A structure and process to join vertically-compressible, electricallyconductive NT pillars to form an anisotropic-electrically conductiveflexible fabric, film or layer.

A structure of the claim (ABOVE) in which an insulative, elastic matrixis combined with an array of vertically-compressible NT pillars to jointhe NT pillar array together to form an anisotropic-electricallyconductive film, layer or fabric.

A structure and process to form a two-part probe card in which anelectrically active probe card base is combined with a replaceable,Universal Probe Interface (UPI) layer or film.

The structure of the claim (ABOVE) in which the UPI is a uniform arrayof NT vertical anisotropic-electrically conductive probe contact bundlesconfined within an elastomeric, insulative matrix defined at astandardized pitch and size forming a highly compressible,anisotropic-electrically conductive film or fabric which is capable ofaligning to any IC wafer bond pad pattern in which the same pad pitch isemployed.

The structure of claim (ABOVE) in which the UPI can be applied to aelectrically active probe card base which is used to route theelectrical ground, power and signals to the IC wafer bond pads throughthe UPI.

The probe card of claim (ABOVE) in which the probe card base and the UPIcombine to form a probe card with a replaceable probe contact layer.

A modified structure of a probe card wherein the electrically conductivecontact having a first and second compressive electrically conductiveprobe element, which form vertically-compressible spring contactelements.

The probe structure of claim (ABOVE) where the first compressive probeelement is a micro-spring, wire-spring or MEMS device.

The probe card of claim (ABOVE), in which vertically compressive NT orother 3-dimensional molecule structures or probe elements are attachedto the first compressive micro-spring structure, providing additionalcompliance range.

The probe card in which vertically compressive probe elements areattached to a flexible or inflatable substrate through which variablecompressive force can be applied to allow varying degrees of probecontact force across the area of an IC or across the area of a wafer.

The probe card in which vertically compressive probe elements areattached to a flexible or inflatable or expandable substrate throughwhich variable compressive force can be applied to allow varying rangeof compliance across the area of an IC or across the area of a wafer.

The probe card in which vertically compressive probe elements areattached to a segmented inflatable multi-chamber inflatable orexpandable substrate through which incrementally variable compressiveforce can be applied to allow varying degrees of probe contact force ordegree of compliance across the area of an IC or across the area of awafer.

The probe card constructed with a combination of the verticallycompressive, anisotropic-electrically conductive NT probe elements, theelectrically active probe card base and the variable compressivemulti-chamber inflatable or expandable substrate test head used inconjunction with Automatic Test Equipment (ATE) for the purpose ofelectrical testing and or burn-in of IC wafers or electrical devicepanels

A structure and process sequence in which a NT fabric is grown on afirst substrate then

-   -   -   a. released from the first substrate,        -   b. Surface prepared and metallized in preparation for            subsequent metal solder bonding, and further metallization        -   c. Metallurgically bonded to an electrically active second            substrate, otherwise referred to as a probe card base,            -   i. Metallurgical bond can be achieved through a solder                mass-reflow or through a laser anneal process.        -   d. NT pillars are defined and electrically isolated from            adjacent NT pillars through the use of laser ablation.        -   e. The electrically isolated NT pillars, formed through            laser ablation, define electrical probes or probe arrays.        -   f. The NT pillars are arranged in bundles, groups or arrays            matched to a semiconductor device I/O pad pattern in order            to provide multiple redundant electrical contacts when used            for the purpose of a semiconductor device or wafer probe            card.        -   g. The individual NT probes and/or NT probe arrays tips are            further metallized with a hard metal layer to provide a            contact point capable of penetrating through a hard            metal-oxide layer, commonly encountered on the surface of            semiconductor device I/O pads        -   h. The integration of the NT probe arrays, to an            electrically active probe card base, forming a device or            wafer-scale probe card.

    -   2. An alternative structure and process sequence in which the NT        fabric is grown on a first substrate then        -   a. released from the first substrate,        -   b. Surface prepared and metallized in preparation for            subsequent metal solder bonding, and further NT Tip            metallization        -   c. Metallurgically bonded to the top-side of an electrically            active second substrate, otherwise referred to as a probe            tile.            -   i. Metallurgical bond can be achieved through a solder                mass-reflow or through a laser anneal process.        -   d. The probe tile, being an electrically active chip used            for the purpose of routing densely packed NT probes (Fine            Pitch) to a less densely packed (larger pitch) array of            electrical contacts on the back-side of the probe tile.        -   e. NT pillars located on the top-surface of the probe-tile            are defined and electrically isolated from adjacent NT            pillars through the use of laser ablation, thus preparing an            electrically active probe tile.        -   f. The electrically isolated NT pillars, formed through            laser ablation, define electrical probes or probe arrays.        -   g. The NT pillars are arranged in bundles, groups or arrays            matched to a semiconductor device I/O pad pattern in order            to provide multiple redundant electrical contacts when used            for the purpose forming a semiconductor device or wafer            probe card.        -   h. The individual NT probes and/or NT probe arrays tips            located on the probe tile are further metallized with a hard            metal layer to provide a contact point capable of            penetrating through a hard metal-oxide layer, commonly            encountered on the surface of semiconductor device I/O pads        -   i. The probe-tiles, comprised of electrically active,            fine-pitch NT probe arrays, electrically routed to            large-pitch electrical pads on the back-side of the NT probe            tile substrate are thus metallurgically bonded to a third            electrically-active substrate to form a probe-card.        -   j. NT probe-tiles formed individually, allowing the            fabrication of very large, wafer scale probe cards through            the assembly of a multitude of smaller NT probe tiles onto a            single, large probe card base.        -   k. NT probe tiles joined to the third, larger probe-card            base through a solder reflow or other suitable metallurgical            bond, forming a full-scale probe card.        -   l. The integration of the electrically active NT probe tiles            to an electrically active probe card base, forming a device            or wafer-scale probe card.        -   m. The complete full scale NT based probe card.

    -   3. A second alternative structure and process sequence in which        a NT fabric is grown directly on a metal substrate then        -   a. Top Surface of NTs surface prepared and metallized in            preparation for subsequent tip metallization        -   b. NT-Substrate interface metallurgy is thermally annealed            to provide a low resistance bond to the metal or            semiconductor substrate.        -   c. The metal substrate is etched down to a thickness that            can later be laser ablated.        -   d. The NT fabric, metallurgically bonded to the thinned            metal substrate is metallurgically bonded to the top-side of            an electrically active second substrate, otherwise referred            to as a probe card base.            -   i. Metallurgical bond can be achieved through a solder                mass-reflow or through a laser anneal process.        -   e. NT pillars are defined and electrically isolated from            adjacent NT pillars through the use of laser ablation.        -   f. The electrically isolated NT pillars, formed through            laser ablation, define electrical probes or probe arrays.        -   g. The NT pillars are arranged in bundles, groups or arrays            matched to a semiconductor device I/O pad pattern in order            to provide multiple redundant electrical contacts when used            for the purpose of a semiconductor device or wafer probe            card.        -   h. The individual NT probes and/or NT probe arrays tips are            further metallized with a hard metal layer to provide a            contact point capable of penetrating through a hard            metal-oxide layer, commonly encountered on the surface of            semiconductor device I/O pads        -   i. The integration of the NT probe arrays, to an            electrically active probe card base, forming a device or            wafer-scale probe card.

    -   4. A third alternative structure and process:        -   a. Growing pre-patterned NT arrays on substrate        -   b. Using polymer to infiltrate within/between bundles        -   c. Removing layer from this substrate        -   d. Metallizing base and contacting (ensure either: a.            polymer temp OK to back and front metal/solder etc.;            metallize with or without conformal front side metal coat,            and with or without the tip forming/attach OR b. polymer            removed after backside metal, then soldered (in case of no            frontside metal);        -   e. Ablation (e.g., laser) to remove the polymer and metal            underneath and from between the die.

Although preferred embodiments have been depicted and described indetail herein, it will be apparent to those skilled in the relevant artthat various modifications, additions, substitutions and the like can bemade without departing from the spirit of the invention and these aretherefore considered to be within the scope of the invention as definedin the following claims.

1. A planar electrical contact layer, facilitating temporary contactbetween a sample under test and a probe card substrate having apre-arranged electrical contact pattern corresponding to a pattern onthe sample, comprising: a plurality of multi-walled nanotubes, directlymetallized at their bases, to allow contact to the pre-arrangedelectrical contact pattern on the probe card substrate.